Crossword Genius

Plant scratching marks in semiconductor element (8)

Ross

I believe the answer is:

geranium

I'm a little stuck... Click here to teach me more about this clue!

'plant' is the definition.
(geranium is a plant)

'scratching marks in semiconductor element' is the wordplay.
I cannot really see how this works, but
'marks' could be 'm' (former German currency) and 'm' is present in the answer.
'element' could be 'ra' (Ra is an example) and 'ra' is found within the answer.
This may be the basis of the clue (or it may be nonsense).

Can you help me to learn more?

(Other definitions for geranium that I've seen before include "Herbaceous plant" , "Cultivated flower often seen in window box" , "Popular flowering pot plant" , "Flower - cranesbill" , "Commonly cultivated plant" .)

I've seen this clue in The Independent.
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