Self-aware at last to proceed? (3)
I believe the answer is:
ego
'self' is the definition.
(synonyms)
'aware at last to proceed?' is the wordplay.
'at last' indicates one should take the final letters.
'to proceed?' becomes 'go' ('go' can be a synonym of 'proceed').
The final letter of 'aware' is 'e'.
'e'+'go'='EGO'
(Other definitions for ego that I've seen before include "Sense of self, conceit" , "Person's sense of self" , "One's sense of self-importance" , "Vowel to disappear, < say another" , "Personal pride" .)